A glass vacuum chuck with excellent transparency is here.
Provides a transparent
vacuum chuck
Differences with conventional porous chucks
A suction jig that uses a porous material to hold and secure a workpiece.
The workpiece is held in place with suction, by applying negative pressure (vacuum) to the interconnected fine pores.
MICRO Vacuum Chuck
What is a
MICRO Vacuum Chuck?
An ultra-high-precision vacuum suction jig developed by Micro Technology.
Instead of porous material, the workpiece (object) is held in place using a suction plate made with processing fine holes in a glass plate.
MICRO Vacuum Chucks feature excellent transparency and a high degree of freedom in design and layout.
MICRO Vacuum Chuck
6 Advantages
Enables observation and work while under suction
Both the suction plate and body are made of transparent glass, so it is possible to observe (inspect) the workpiece while it is still attached.
Tasks that were difficult with porous chucks, such as shining light or UV light from below the body or photographing through the chuck with a camera, are now possible.
Custom designs possible, such as suction force and partial suction
With high-precision processing of fine holes, parts with any hole diameter, pitch, or size (minimum diameter: 10 μm; minimum pitch: 30 μm; maximum size: 500 mm square) can be designed and manufactured.
Designs can cater to a wide range of needs, such as adjusting suction force to suit the workpiece shape and material, or providing suction in only specific areas.
An example is vacuum-suctioning thin workpieces such as wafers without causing damage.
Suction plate shapes designed with a high degree of freedom
Chucks can be manufactured with the desired shape to suit any application, such as a perfect circle, ellipse or square.
End-face machining is also possible, such as thread chamfering, C chamfering and R chamfering.
Reduces static electricity on the suction-plate surface
Forming fine textures (matte processing) on the glass surface helps to prevent the generation of static electricity during work.
For matte processing, the optional density (color tone) and design to suit work requirements can be specified.
Custom-made designs to fully meet objectives and applications
Precision polishing of the suction plate is also available
The MICRO Vacuum Chuck is anticipated
to deliver true value in these fields
・Exposure
・Dicing
・Coaters
・Mounting
・Polishing/CMP
・Inspections, etc.
Electronic components
・Printing equipment
・Inspections
Medical devices
Food
Automotive
Frequently Asked Questions
Frequently Asked Questions
What is the maximum size of the glass chuck and glass body?
What is the maximum thickness of the glass chuck and glass body?
Up to 1 mm for the glass chuck, and 10 mm for the glass body, for a combined maximum of 11 mm.
What is the production lead time?
How many units can I purchase from?
Purchases start from a minimum of 1 unit.
Is it possible to borrow a sample?
We can lend samples. Please contact us via the inquiry form.
What is the approximate cost?
After confirming your desired specifications, we will prepare an estimated quotation. Please feel free to contact us using the inquiry form.
What is the difference with a porous chuck?
The principle behind holding and securing the workpiece is the same as that of a porous chuck.
The MICRO Vacuum Chuck offers the advantage of allowing suction zones to be created at any desired location, as the holes are formed with fine processing.
Given the high transparency of glass, tasks such as observation while the workpiece is under suction, are also possible.
Please feel free to contact us.
Inquiry form
