Resist coating process
Overview
Using coating technologies such as slit, spin and spray, we apply resists and functional materials to a variety of substrates using a wide range of materials, from low to high viscosity, under optimal conditions depending on the application.
Features
Based on the coating experience and technical capabilities we have cultivated over the nearly 60 years since our founding, we can propose and respond to the optimal coating method according to the material characteristics and application.
Compatible with both positive and negative resists
In addition to positive resists that are suitable for forming fine patterns, we can also handle negative resists that are developed in solvents. We can accommodate your needs.
Able to handle a wide range of coating materials from low to high viscosity
Can handle a wide range of coating materials, from low to high viscosity. 1cp to 10,000cp (from low viscosity materials like water to high viscosity paste materials) We have a proven track record of coating materials in a variety of viscosity ranges.
Enables uniform coating without unevenness
Uniform coating with minimal unevenness is possible. By using various coating methods such as slit, spin, and spray, we can achieve uniform film thickness by controlling conditions according to the substrate size and material properties.
Various other surface functional coatings are available
[Application examples] - Anti-fingerprint coating
Specification
Processing size
～300×300mm
Coating thickness
1μm～50μm
Coating viscosity
1cp～10000cp
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